Tuesday 24 June 2014
On 18 June 2014, S.N.R. Kazmi successfully defended his Ph.D. thesis “Capacitively Transduced Polycrystalline GeSi MEM Resonators”. The work deals with low-temperature microfabricated resonator structures for passive band pass filters. New results compiled in this thesis include low-stress highly boron-doped GeSi thin films, and optimized recipe for highly selective anisotropic etching of GeSi, and a microresonator with record-high fQ product.
