Date & location
29 September 2025
Kinepolis Enschede
Programme
08.30 | Doors open | |
09.00 | Opening by Prof. Hans Hilgenkamp (MT MESA+) and Prof. Vinod Subramaniam (President Executive Board) | |
09.15 | Prof. Hans Hilgenkamp: 25 years MESA+ | |
10.00 | Keynote lecture 1: Prof. Ulrike Diebold (Technische Universität Wien) Atomically-resolved Surfaces: Where Theory and Experiments MeetAbstract: Oxides show vast variability in electronic and chemical properties, which makes them ideal materials in a large range of technical applications. Often, surfaces and interfaces play a major role in the functioning of related devices and schemes. Our research group is devoted to investigating the fundamental properties of oxide surfaces, from complex reconstructions [1] to the interplay between localised charges (‘polarons [2, 3]’) and chemical properties [4]. In the talk, I will highlight a few recent results that are all based on the fruitful interaction between experiments using surface science methods and ab initio calculations.
Bio:Ulrike Diebold is a professor of surface physics at TU Wien. She received her PhD from this institution and then spent 20 years as an academic in the U.S. before returning to her alma mater in 2010. She conducts research in experimental surface science with an emphasis on metal oxides. She is particularly interested in the atomic-scale properties of these complex materials and in unravelling their (defect)structure/reactivity relationship. Diebold heads the coordinated research project SFB TACO, which is devoted to advancing the modeling of materials. She is the recipient of major awards, including two ERC Advanced Grants and the Wittgenstein Prize, the highest research award in her country. Since 2022, she has served as the vice president of the Austrian Academy of Science. |
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10.45 | Poster session and coffee/tea | |
11.40 | Parallel session on
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13.00 | Lunch and poster session | |
14.10 | Parallel sessions on:
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15.30 | Poster session and coffee/tea | |
16.30 | Keynote lecture 2: Prof. Vadim Banine (Sr. Director ASML Research and prof TU Eindhoven) EUV Lithography: now and in the futureIn this plenary talk delivered at MESA+ in September 2025, a comprehensive overview of the evolution, current state, and future trajectory of Extreme Ultraviolet Lithography (EUVL) will be given. The presentation traces EUV’s journey from early research and global collaboration to its industrialisation and widespread adoption in high-volume semiconductor manufacturing. The talk explores the technological milestones that enabled EUV’s success, including advances in resolution scaling, optics lifetime, and defectivity control. It contextualises EUV within broader industry trends such as Moore’s Law, system-level energy efficiency, and the rise of High-NA platforms. Key insights include the roadmap for NA 0.33 and NA 0.55 systems, their impact on patterning simplification, and the stabilisation of energy and mask usage despite increasing chip complexity. The presentation also highlights the strategic decisions behind ASML’s down-selection of EUV over other lithography technologies, the role of global partnerships, and the implications of EUV for future logic and memory nodes. Concluding with reflections on innovation, the talk positions EUV as the defining lithography of today and tomorrow. Bio:Vadim Banine is Senior Director of Research at ASML and part-time professor at Eindhoven University of Technology, where he holds the chair in EUV Lithography. Over the years, Vadim has contributed to the development and leadership of numerous engineering and research initiatives within ASML, including roles in Veldhoven and Berlin. His experience spans areas such as pioneering EUV lithography, defectivity control, general lithography research, and organisational development. Vadim has led teams through periods of growth and transition, and has been involved in shaping strategies for product development and cross-site collaboration. He also maintains an active academic role, supervising PhD and Master students and participating in scientific review boards. Vadim co-authored over 60 publications on the subject of lithography and is an inventor on ~200 patents, having been recognised with the European Patent Award in 2018. |
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17.15 | Presentation prizes:
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17.45 | Drinks and finger food | |
18.45 | MESA+ House Band |
