Sunday 7 August 2016
Micromachined 3D fractals were never easier
In a collaboration project with researchers from the University of Zaragoza (Spain), we have simplified the fabrication of our micromachined 3D fractal structures, eliminating the need of LPCVD silicon nitride and LOCOS. This was presented on the 2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) and an associated